Our Products

85UHP

Model 85UHP is a weldable compact profile, media compatible, pressure sensor, a MEMS piezo-resistive chip integrated in a 316L stainless steel or alloy C276 module with silicone oil filled which transfer pressure from a thin corrugated diaphragm in the front face.

It was designed and manufactured for OEM where customer seeking a semiconductor application process duration that is greater than TE standard 85 ISO capsule, it offers wetted material options and surface roughness optimized for ultra-high purity and ultra-high vacuum scenarios, harnessing TE’s advanced MEMS capabilities to deliver unparalleled precision and stability.

Technical Data

Key Specifications

  • C276 or 316L SS Wetted Surface material – Optional
  • Compensated or Uncompensated – optional
  • High Vacuum Stability at 10-3 Pa
  • 0.1%Span/year Long Term Stability
  • Absolute Pressure Measurement
  • 13mm Diaphragm Diameter
  • Hi-Vacuum Stability
  • F105 Compliant Wetted Surfaces (Alloy C276 Variants)
  • -40ºC to +125ºC Operating Temperature
  • Up to ±0.1% Pressure Non-Linearity
  • Solid State Reliability

Product Configurations

Product Number Internal Product Number Pressure Output Signal Type Supply Voltage Range Series
85UHP-015A-US1 20032150-00 1.03 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-030A-US1 20032150-01 2.07 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-050A-US1 20032150-02 3.45 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-100A-US1 20032150-03 6.89 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-015A-UC1 20032150-04 1.03 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-030A-UC1 20032150-05 2.07 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-050A-UC1 20032150-06 3.45 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-100A-UC1 20032150-07 6.89 bar Sensitivity = 12 – 27mV/V 5 – 9.5 V 85UHP
85UHP-015A-VS1C 20032150-10 1.03 bar 100mV 5 – 14 V 85UHP
85UHP-030A-VS1C 20032150-11 2.07 bar 100mV 5 – 14 V 85UHP
85UHP-050A-VS1C 20032150-12 3.45 bar 100mV 5 – 14 V 85UHP
85UHP-100A-VS1C 20032150-13 6.89 bar 100mV 5 – 14 V 85UHP
85UHP-015A-VC1C 20032150-14 1.03 bar 100mV 5 – 14 V 85UHP
85UHP-030A-VC1C 20032150-15 2.07 bar 100mV 5 – 14 V 85UHP
85UHP-050A-VC1C 20032150-16 3.45 bar 100mV 5 – 14 V 85UHP
85UHP-100A-VC1C 20032150-17 6.89 bar 100mV 5 – 14 V 85UHP
85UHP-015A-CS1C 20032150-30 1.03 bar 100mV 5 – 14 V 85UHP
85UHP-030A-CS1C 20032150-31 2.07 bar 100mV 5 – 14 V 85UHP
85UHP-050A-CS1C 20032150-32 3.45 bar 100mV 5 – 14 V 85UHP
85UHP-100A-CS1C 20032150-33 6.89 bar 100mV 5 – 14 V 85UHP
85UHP-015A-CC1C 20032150-34 1.03 bar 100mV 5 – 14 V 85UHP
85UHP-030A-CC1C 20032150-35 2.07 bar 100mV 5 – 14 V 85UHP
85UHP-050A-CC1C 20032150-36 3.45 bar 100mV 5 – 14 V 85UHP
85UHP-100A-CC1C 20032150-37 6.89 bar 100mV 5 – 14 V 85UHP

Applications

  • Gas Cabinets
  • Mass Flow Controller
  • High Purity Gas Delivery system
  • Pressure and Flow control in
  • Semiconductor Process

Downloads

85UHP_A2 datasheet (pdf)

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