The LHD ULTRA differential low-pressure sensors are based on thermal flow measurement of gas through micro-flow channels integrated within the silicon sensor chip. This feature-rich module uses dual micro-flow channels to effectively maximize the dynamic range of the sensor. The highly sensitive sensing element is able to accurately resolve sub-pascal variations at low pressures, while the second element extends the measurement range up to 5000 pascals. An onboard microcontroller with accurate 24-bit ADC provides signal processing including stitching of the response of two sensing elements, linearization, and temperature compensation. The LHD ULTRA sensors are the ideal tool for applications that demand high precision, extended measurement range, and the convenience of a single device.
