LME

The LME differential low-pressure sensors are based on thermal flow measurement of gas through a micro-flow channel integrated within the sensor chip. The innovative LME technology features superior sensitivity especially for ultra-low pressures. The extremely low gas flow through the sensor ensures high immunity to dust contamination and long tubing compared to other flow-based pressure sensors.

Technical Data

Ultra-low pressure ranges from 25 to 2500 Pa (0.1 to 10 inH2O)
Pressure sensor based on thermal micro-flow measurement
High flow impedance
very low flow-through leakage
high immunity to dust
no loss in sensitivity using long tubing
Outstanding long-term stability and precision with patented real-time offset compensation and linearization techniques
Offset long term stability better than 0.1 Pa/year
Total accuracy better than 0.5% FS typical
On-chip temperature sensor
Linearized digital SPI and analog outputs
Small footprint, low profile, only 9 mm in height, and robust package
Pressure ports for direct manifold assemblies
Highly versatile to fit to application-specific mounting adapters and manifolds
Minimized internal volume and manifold mount option allow for fast gas purge time
No position sensitivity

Back

Product Inquiry

Please contact us. We will get back to you as soon as possible.

Your Contact Person

Pascal Wittfeld

Field Application Engineer

+49 (0)5424 2340-54

write email