LMI

The LMI differential low-pressure sensors are based on thermal flow measurement of gas through a micro-flow channel integrated within the sensor chip. The innovative LMI technology features superior sensitivity especially for ultra-low pressures. The extremely low gas flow through the sensor ensures high immunity to dust contamination and long tubing compared to other flow-based pressure sensors.

Technical Data

Key Specifications

Ultra-low pressure ranges from 25 to 5000 Pa (0.1 to 10 inH2O)
Pressure sensor based on thermal micro- flow measurement
High flow impedance
very low flow-through leakage
high immunity to dust
no loss in sensitivity using long tubing
Outstanding long-term stability and precision with patented real-time offset compensation and linearization techniques
Total accuracy better than 0.5% FS typical
On-chip temperature sensor
Two user-driven modes of operation
low power mode (400 µA standby current)
continuous mode (5 ms sampling time)
Ideal for battery-operated applications
Linearized digital I²C output with 16 bit sigma-delta A/D conversion
Small footprint, low profile, only 9 mm in height, and robust package
Pressure ports for direct manifold assemblies
Highly versatile to fit to applicationspecific mounting adaptors and manifolds
Minimized internal volume and manifold mount option allow for fast gas purge time
No position sensitivity

Product Configurations

Product Description	Marketing Part Number	Pressure Range (≈)	Series
LMIM010BB3S	1010377-F	10mBar	First Sensor LMI
LMIM010UB3S	1010378-F	10mBar	First Sensor LMI
LMIM012UB3S	1010380-F	12mBar	First Sensor LMI
LMIM025BB3S	1010381-F	25mBar	First Sensor LMI
LMIS025UB3S	1010384-F	0.25mBar	First Sensor LMI
LMIS050BB3S	1010385-F	0.5mBar	First Sensor LMI
LMIS100UB3S	1010388-F	1mBar	First Sensor LMI
LMIS500UB3S	1010392-F	5mBar	First Sensor LMI
LMIS350UB3S	1011435-F	3.5mBar	First Sensor LMI
LMIM050BB3S	1014304-F	50mBar	First Sensor LMI
LMIM050UB3S	20020628-00	50mBar	First Sensor LMI
LMIM012BB3S	1010379-F	12mBar	First Sensor LMI
LMIM025UB3S	1010382-F	25mBar	First Sensor LMI
LMIS025BB3S	1010383-F	0.25mBar	First Sensor LMI
LMIS050UB3S	1010386-F	0.5mBar	First Sensor LMI
LMIS100BB3S	1010387-F	1mBar	First Sensor LMI
LMIS250BB3S	1010389-F	2.5mBar	First Sensor LMI
LMIS500BB3S	1010391-F	5mBar	First Sensor LMI