NMCM-090

Piezo Motor Driver Modul for PiezoLEGS®

Compatible to TMCM-090 module (EOL)

The NMCM-090 is a compact piezo motor driver module for high precision and highly dynamic piezo axis. It is specially designed for four phase piezo motors, like the PIEZO MOTOR „Piezo Legs®“. It can be combined with any step/direction controller. The board can be connected to a baseboard or customized electronics with a pin connector. Applications are optical and analytical instruments. Its high microstep resolution leads to a linear motor resolution of about 4nm per microstep.

Applications

• highly precise positioning for optical and analytical instruments
• manufacturing equipment for semiconductor components
• high density multi axis drive electronics

Motor type

• Piezomotor PiezoLegs® four phase Piezo motor

Highlights

• drives piezo legs’ 0,5μF capacity inputs with up to 3kHz step frequency
• up to 2048 times microstepping using step / direction interface
• up to 64 times microstepping using SPI control with direct access to DACs
• step/direction control or SPI control
• Motor outputs protected against short to GND
• Overtemperature protection of driver stage
• small credit card sized board