The SM7000/SM6000/SM5000 are low pressure MEMS sensors offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce either an analog and/or digital output fully conditioned, multi-order pressure and temperature compensated. This series provides JEDEC standard SOIC-16 package with vertical or horizontal porting options. It is available in gage, differential and asymmetric differential configurations. With the dual porting, a reference measurement is possible to minimize errors due to changes in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a custom correction algorithm.
Customer-specified pressure ranges and supply voltages are available.
The SM7000/SM6000/SM5000 are shipped in sticks or tape & reel.
The SM6000 and SM5000 digital output only sensors earned the AccuStable quality label. The AccuStable brand stands for <1% total error band initially and <1% shift during operation over 10 year lifetime. Qualification is based on 1000 hours HTOL (High-temperature operating life) test at 85°C with 5V.
Product Number | Internal Product Number | Pressure Type | Pressure Range (≈) | Output Signal Type | Pressure Accuracy | Supply Voltage Range | Operating Temperature Range | Sensor Options | Series |
SM5231-BCE-S-010.00-431 | 5231-BCE-S-010-000 | Gauge | 100mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Dual Output, Tube | SMI 5000 |
SM5291-BCE-S-100.00-631 | 5291-BCE-S-100-000 | Gauge | 100mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5295-BGM-S-040-000 | 5295-BGM-S-040-000 | Gauge | 100mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5331-BCE-S-010.00-431 | 5331-BCE-S-010-000 | Differential | 100mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 5000 |
SM5391-BBE-S-001.40-131 | 5391-BBE-S-014-000 | Differential | 96mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BBE-T-014-000 | 5391-BBE-T-014-000 | Differential | 100mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BCE-S-001.00-131 | 5391-BCE-S-001-000 | Differential | 70mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BCE-S-012.00-451 | 5391-BCE-S-012-001 | Differential | 120mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BCE-S-100.00-631 | 5391-BCE-S-100-000 | Differential | 100mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BCE-T-001-000 | 5391-BCE-T-001-000 | Differential | 70mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5391-BHQ-T-001-001 | 5391-BHQ-T-001-001 | Differential | 70mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM5491-BCE-S-140-002 | 5491-BCE-S-140-002 | Differential | 40mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 5000 |
SM6291-BCE-S-030.00-231 | 6291-BCE-S-030-000 | Gauge | 30mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6295-BCM-S-040-000 | 6295-BCM-S-040-000 | Gauge | 40mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6295-BCM-T-040-000 | 6295-BCM-T-040-000 | Gauge | 40mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6295-BGC-S-040-000 | 6295-BGC-S-040-000 | Gauge | 40mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6295-BGC-S-040-002 | 6295-BGC-S-040-002 | Gauge | 40mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6295-BGC-T-040-002 | 6295-BGC-T-040-002 | Gauge | 40mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 6000 |
SM6331-BCE-S-004.00-431 | 6331-BCE-S-004-000 | Differential | 40mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 6000 |
SM6331-BCE-S-005.50-431 | 6331-BCE-S-005-000 | Differential | 55mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 6000 |
SM6391-BCE-S-040.00-631 | 6391-BCE-S-040-000 | Differential | 40mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, Dual Output | SMI 6000 |
SM7231-BCE-S-002.00-451 | 7231-BCE-S-002-001 | Gauge | 20mBar | 16 bit I2C | ±1% F.S | 5 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
SM7231-BCE-T-002-001 | 7231-BCE-T-002-001 | Gauge | 20mBar | 16 bit I2C | ±1% F.S | 5 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
SM7291-BCE-S-001.00-431 | 7291-BCE-S-001-000 | Gauge | 10mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7291-BCE-S-010.00-231 | 7291-BCE-S-010-000 | Gauge | 10mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7331-BCE-S-001.00-431 | 7331-BCE-S-001-000 | Differential | 10mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
SM7331-BCE-S-001.00-451 | 7331-BCE-S-001-001 | Differential | 10mBar | 16 bit I2C | ±1% F.S | 5 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
SM7331-BCE-S-002.00-431 | 7331-BCE-S-002-000 | Differential | 20mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
SM7391-BCE-S-000.14-131 | 7391-BCE-S-014-000 | Differential | 10mBar | 16 bit I2C | ±1.5% F.S, ±1% F.S | 3 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-S-002.00-431 | 7391-BCE-S-002-000 | Differential | 20mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-S-002.00-451 | 7391-BCE-S-002-001 | Differential | 20mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-S-005.00-831 | 7391-BCE-S-005-000 | Differential | 13mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-S-500.00-331 | 7391-BCE-S-500-000 | Differential | 5mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-T-002-000 | 7391-BCE-T-002-000 | Differential | 20mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-T-002-001 | 7391-BCE-T-002-001 | Differential | 20mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-T-014-000 | 7391-BCE-T-014-000 | Differential | 10mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7391-BCE-T-500-000 | 7391-BCE-T-500-000 | Differential | 5mBar | 10 – 90% Vdc, 16 bit I2C | ±1.5% F.S, ±1% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7421-BBE-S-016-000 | 7421-BBE-S-016-000 | Differential | 10mBar | 16 bit I2C | ±1.5% F.S | 3.3 – 5 V | -40 – 105 °C | Barb Tube, Dual Output | SMI 7000 |
SM7431-BCE-S-001.00-431-000.80 | 7431-BCE-S-001-000 | Differential | 10mBar | 16 bit I2C | ±1% F.S | 3 V | -20 – 85 °C | Barb Tube, No Option | SMI 7000 |
Gage & Differential Pressure Sensors
Gage & Differential Pressure Sensors
Ultra low Pressure Sensor Family