Ultra-Compact Piezoelectric XYZ Stage for Precision Motion
The LRMO-XYZ system integrates three precision miniature linear piezomotors (PMC Model# LRMO) into a compact XYZ stage, providing precise multi-axis motion in an ultra-small footprint. It is ideal for space-limited applications where silent operation, zero backlash, and sub-micron resolution are required. The LRMO-XYZ offers reliable, high-precision XYZ motion control for delicate applications where traditional XYZ designs are too bulky, heavy or generate electromagnetic interference, making it ideal for next-generation motion solutions in optics, life sciences, and precision instrumentation.
The electronic driver is designed to offer an economical interface for user control. Motion of the motor is achieved via PWM (Pulse Width Modulation) control signals. The driver PCB also supports UART and I2C interfaces. The driver PCB is pre-programmed for software configurability, optimizing drive signals and integrating controls. Motor operation can be finely regulated through closed-loop control using an optional encoder factory-installed on the actuator.
| Part No. | LRMO-XYZ |
| Power Supply | 5,0 V DC |
| Push/Pull Force | ≥ 0,2 N |
| Self-Braking Force | ≥ 0,25 N |
| Actuator Response Time | » 30 µs |
| Travel Range | 9,0 mm |
| Max Speed (continuous mode) | » 150 mm/s |
| Minimum Linear Step | < 0,04 µm (<40 nm) |
| Linear Backlash at Change of Direction | < 0,1 µm |
| Elastic Stiffness | » 200 mN/µm |
| Linear Hysteresis | <2,0 µm |
| Pitch | <1 mrad |
| Maximum Moment Mx0.07 Nm | 0,07 Nm |
| Roll | < 0,5 mrad |
| Maximum Moment My | 0,12 Nm |
| Yaw | <1 mrad |
| Maximum Moment Mz | 0,9 Nm |
| Vertical Runout | 3,0 µm |
| Horizontal Runout | 6,0 µm |
| Frequency Response | 4 kHz |
| Operating Temperature | -20 °C to 80 °C |
| Maximum Load (at listed specification) | 20 g |
| Maximum Tolerable Load | 4,2 kgf |
| Max Current (continuous mode) | 300 mA |
| Max. Current at the velocity 10mm/s (PWM mode) | 30-40 mA |
| System Weight | 3,7 g |
| System Dimensions | 44,6 x 27,1 x 27,1 mm |
LRMO-XYZ brochure (PDF)
LRMO-XYZ manual (PDF)
Piezo Driver (Green PCB) closed loop for LRMO-E
Piezo Driver (Red PCB) open loop for LRMO & ROMO